An Introduction to microelectromechanical systems engineering /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boston
Artech House
2004
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| Edition: | Second edition. |
| Series: | Microelectromechanical systems series
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| Subjects: | |
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| ISBN: | 1580535909 9781580535908 |
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