An Introduction to microelectromechanical systems engineering /
Guardat en:
Autor principal: | Maluf, Nadim (Autor) |
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Altres autors: | Williams, Kirt |
Format: | Llibre |
Idioma: | English |
Publicat: |
Boston
Artech House
2004
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Edició: | Second edition. |
Col·lecció: | Microelectromechanical systems series
|
Matèries: | |
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