An Introduction to microelectromechanical systems engineering /
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Main Author: | Maluf, Nadim (Author) |
---|---|
Other Authors: | Williams, Kirt |
Format: | Book |
Language: | English |
Published: |
Boston
Artech House
2004
|
Edition: | Second edition. |
Series: | Microelectromechanical systems series
|
Subjects: | |
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