Integration of functional oxides with semiconductors /
This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide sy...
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Format: | eBook |
Language: | English |
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New York, NY
Springer New York
2014.
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Online Access: | Click here to view the full text content |
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