Dry Etching Technology for Semiconductors /
This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which p...
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| 格式: | 电子书 |
| 语言: | English |
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Cham :
Springer International Publishing : Imprint: Springer,
2015.
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| 在线阅读: | Click here to view the full text content |
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