APA (7th ed.) Citation

Del Castillo, E., Hurwitz, A. M., & Moyne, J. (2001). Run-to-Run Control in semiconductor manufacturing. CRC Press.

Chicago Style (17th ed.) Citation

Del Castillo, Enrique, Arnon Max Hurwitz, and James Moyne. Run-to-Run Control in Semiconductor Manufacturing. Boca Raton: CRC Press, 2001.

MLA (8th ed.) Citation

Del Castillo, Enrique, et al. Run-to-Run Control in Semiconductor Manufacturing. CRC Press, 2001.