Run-to-Run Control in semiconductor manufacturing /

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Bibliographic Details
Other Authors:	Del Castillo, Enrique, Hurwitz, Arnon Max, Moyne, James
Format:	Book
Language:	English
Published:	Boca Raton CRC Press c2001
Subjects:	Electronic packaging. Semiconductor industry > Production control Semiconductors > Design and construction
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Description
Item Description:	Also available via ENGnetBASE
Physical Description:	348 pages: illustrations; 24 cm.
ISBN:	0849311780

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