MEMS pressure sensor for gait analysis /

The objectives of this research are ; to design the MEMS pressure sensor by using COMSOL software ; to study the effect of pressure sensor by using two different materials, PZT and ZnO with different thickness sizes of piezoelectric material ; to identify the minimum and maximum pressure for gait ap...

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Bibliographic Details
Main Author: Nurismaliza Jurami (Author)
Corporate Author: Universiti Malaysia Perlis
Format: Thesis Book
Language:English
Published: Perlis, Malaysia School of Microelectronic Engineering, Universiti Malaysia Perlis 2017
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