Normah Bt Ahmad. (2007). Characterization of alignment mark to obtain reliable alignment performance in advanced lithography. Universiti Malaysia Perlis (UniMAP).
Chicago Style (17th ed.) CitationNormah Bt Ahmad. Characterization of Alignment Mark to Obtain Reliable Alignment Performance in Advanced Lithography. Perlis: Universiti Malaysia Perlis (UniMAP), 2007.
MLA (8th ed.) CitationNormah Bt Ahmad. Characterization of Alignment Mark to Obtain Reliable Alignment Performance in Advanced Lithography. Universiti Malaysia Perlis (UniMAP), 2007.
Warning: These citations may not always be 100% accurate.