Contact hole printing beyond 190NM in photolithography processing using resolution enhancement techniques
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| Format: | Thesis Book |
| Language: | English |
| Published: |
Kangar
Universiti Malaysia Perlis (UniMAP)
2008
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| 100 | 1 | |a Cheong Yew Shun, |e author | |
| 245 | 1 | |a Contact hole printing beyond 190NM in photolithography processing using resolution enhancement techniques | |
| 260 | |a Kangar |b Universiti Malaysia Perlis (UniMAP) |c 2008 | ||
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| 650 | 0 | |a Photolithography | |
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