Contact hole printing beyond 190NM in photolithography processing using resolution enhancement techniques

Antzeko izenburuak

• Photo-offset /
  nork: Lathrop, Irvin T.
  Argitaratua: (1979)
• Optimization of line pattern transfer of integrated optical mach-zender interferometer for optical sensor /
  nork: Nurulbariah Idris author
  Argitaratua: (2016)
• Optimization of line pattern transfer of integrated optical mach-zender interferometer for optical sensor /
  nork: Nurulbariah Idris author
  Argitaratua: (2016)
• Development of three dimensional (3D) grayscale photolithography process for microfluidic curvature structures /
  nork: Intan Sue Liana Abdul Hamid
  Argitaratua: (2018)
• Jurucetak lithographic (lithographic pressman) : F-022-1, jurucetak lithographic kanan = senior lithographic pressman : F-022-2, penyelia percetakan lithographic = lithographic press supervisor : F-022-3
  Argitaratua: (2001)