Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /

Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /

The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.

محفوظ في:

التفاصيل البيبلوغرافية
المؤلف الرئيسي:	Mohammad Nuzaihan Bin Md Nor (مؤلف)
مؤلف مشترك:	Universiti Malaysia Perlis
التنسيق:	أطروحة برمجيات كتاب الكتروني
اللغة:	English
منشور في:	Kangar Universiti Malaysia Perlis (UniMAP) 2007.
الموضوعات:	Nanowires Nanostructure materials > Electric properties Electrochemistry.
الوسوم:	إضافة وسم لا توجد وسوم, كن أول من يضع وسما على هذه التسجيلة!

الوصف
الملخص:	The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.
وصف المادة:	Tesis 2007 Accompanied by CD-ROM (901000006)
وصف مادي:	xxv, 108 p. ill. 30 cm. + 1 CD-ROM (4 3/4 in.)