Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /

Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /

The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.

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Hlavní autor: Mohammad Nuzaihan Bin Md Nor (Autor)
Korporativní autor: Universiti Malaysia Perlis
Médium: Diplomová práce Program E-kniha
Jazyk:English
Vydáno: Kangar Universiti Malaysia Perlis (UniMAP) 2007.
Témata:
Nanowires
Nanostructure materials > Electric properties
Electrochemistry.
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Shrnutí:The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.
Popis jednotky:Tesis 2007
Accompanied by CD-ROM (901000006)
Fyzický popis:xxv, 108 p. ill. 30 cm. + 1 CD-ROM (4 3/4 in.)

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