Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /
The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.
Na minha lista:
| Autor principal: | |
|---|---|
| Autor Corporativo: | |
| Formato: | Tese Software livro eletrônico |
| Idioma: | English |
| Publicado em: |
Kangar
Universiti Malaysia Perlis (UniMAP)
2007.
|
| Assuntos: | |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|
| Resumo: | The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method. |
|---|---|
| Descrição do item: | Tesis 2007 Accompanied by CD-ROM (901000006) |
| Descrição Física: | xxv, 108 p. ill. 30 cm. + 1 CD-ROM (4 3/4 in.) |