Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /

Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /

The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.

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Bibliografiska uppgifter
Huvudupphovsman: Mohammad Nuzaihan Bin Md Nor (Författare, medförfattare)
Institutionell upphovsman: Universiti Malaysia Perlis
Materialtyp: Lärdomsprov Datorprogram E-bok
Språk:English
Publicerad: Kangar Universiti Malaysia Perlis (UniMAP) 2007.
Ämnen:
Nanowires
Nanostructure materials > Electric properties
Electrochemistry.
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Beskrivning
Sammanfattning:The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.
Beskrivning:Tesis 2007
Accompanied by CD-ROM (901000006)
Fysisk beskrivning:xxv, 108 p. ill. 30 cm. + 1 CD-ROM (4 3/4 in.)

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