Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /
The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.
Guardado en:
| Autor principal: | |
|---|---|
| Autor Corporativo: | |
| Formato: | Tesis Software eBook |
| Lenguaje: | English |
| Publicado: |
Kangar
Universiti Malaysia Perlis (UniMAP)
2007.
|
| Materias: | |
| Etiquetas: |
Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!
|