Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /
The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.
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| Format: | Thèse Logiciel eBook |
| Langue: | English |
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Kangar
Universiti Malaysia Perlis (UniMAP)
2007.
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