Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /

Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /

The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.

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書誌詳細
第一著者:	Mohammad Nuzaihan Bin Md Nor (著者)
団体著者:	Universiti Malaysia Perlis
フォーマット:	学位論文ソフトウェア eBook
言語:	English
出版事項:	Kangar Universiti Malaysia Perlis (UniMAP) 2007.
主題:	Nanowires Nanostructure materials > Electric properties Electrochemistry.
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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