Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /
The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.
Spremljeno u:
| Glavni autor: | |
|---|---|
| Autor kompanije: | |
| Format: | Disertacija Softver e-knjiga |
| Jezik: | English |
| Izdano: |
Kangar
Universiti Malaysia Perlis (UniMAP)
2007.
|
| Teme: | |
| Oznake: |
Dodaj oznaku
Bez oznaka, Budi prvi tko označuje ovaj zapis!
|
Budi prvi tko komentira!