Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /

The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.

שמור ב:
מידע ביבליוגרפי
מחבר ראשי: Mohammad Nuzaihan Bin Md Nor (Author)
מחבר תאגידי: Universiti Malaysia Perlis
פורמט: Thesis תכנה ספר אלקטרוני
שפה:English
יצא לאור: Kangar Universiti Malaysia Perlis (UniMAP) 2007.
נושאים:
תגים: הוספת תג
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