Silicon nanowire sensor from electron beam litography : design, fabrication and characterization /

Silicon nanowire sensor from electron beam litography : design, fabrication and characterization /

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This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. There are three objectives that applied to this research work. The first objective is to design masks using GDSII Ed...

Disgrifiad llawn

Wedi'i Gadw mewn:

Manylion Llyfryddiaeth
Prif Awdur:	Siti Fatimah Abd Rahman (Awdur)
Awdur Corfforaethol:	Universiti Malaysia Perlis
Fformat:	Traethawd Ymchwil Llyfr
Iaith:	English
Cyhoeddwyd:	Perlis, Malaysia School of Microelectronic 2011.
Pynciau:	Nanowires.
Tagiau:	Ychwanegu Tag Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!

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