Silicon nanowire sensor from electron beam litography : design, fabrication and characterization /

Silicon nanowire sensor from electron beam litography : design, fabrication and characterization /

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This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. There are three objectives that applied to this research work. The first objective is to design masks using GDSII Ed...

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Bibliografiske detaljer
Hovedforfatter:	Siti Fatimah Abd Rahman (Author)
Institution som forfatter:	Universiti Malaysia Perlis
Format:	Thesis Bog
Sprog:	English
Udgivet:	Perlis, Malaysia School of Microelectronic 2011.
Fag:	Nanowires.
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