Microchannel interrogation with Twyman-Green Interferometer/
The main objective of this study is to develop a non-contact measuring instrument capable of performing depth measurements of a microfluidic channel made of silica wafer.
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Formato: | Tese Livro |
Idioma: | English |
Publicado em: |
Perlis, Malaysia
School of Microelectronic Engineering
2011.
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Resumo: | The main objective of this study is to develop a non-contact measuring instrument capable of performing depth measurements of a microfluidic channel made of silica wafer. |
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Descrição Física: | x, 129 pages illustrations 30 cm. |
Bibliografia: | Includes bibliographical references (pages 109-111). |