Microchannel interrogation with Twyman-Green Interferometer/
The main objective of this study is to develop a non-contact measuring instrument capable of performing depth measurements of a microfluidic channel made of silica wafer.
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| Format: | Thesis Bog |
| Sprog: | English |
| Udgivet: |
Perlis, Malaysia
School of Microelectronic Engineering
2011.
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