Surface characterization of silicon and glass for anodic bonding at room temperature using lab assembled high voltage device /
The main objective of this study is to investigate high voltage anodic bonding at room temperature and determine if hermetic anodic bonding can be achieved.
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| Format: | Thesis Book |
| Language: | English |
| Published: |
Perlis, Malaysia
School of Microelectronic Engineering
2011.
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| Summary: | The main objective of this study is to investigate high voltage anodic bonding at room temperature and determine if hermetic anodic bonding can be achieved. |
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| Physical Description: | x, 99 pages illustrations 30 cm. |
| Bibliography: | Includes bibliographical references (pages 85-89). |