Advances in multiphysics simulation and experimental testing of MEMS /

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Bibliographic Details
Other Authors:	Frangi, Attilio
Format:	Book
Language:	English
Published:	London Imperial College Press 2008.
Series:	Computational and experimental methods in structures ; v. 2
Subjects:	Microelectromechanical systems > Simulation methods. Microelectromechanical systems > Testing.
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