APA (7th ed.) Citation

Madou, M. J. (2012). Fundamentals of microfabrication and nanotechnology (3rd ed.). CRC Press/Taylor & Francis Group.

Chicago Style (17th ed.) Citation

Madou, Marc J. Fundamentals of Microfabrication and Nanotechnology. 3rd ed. Boca Raton, Fla: CRC Press/Taylor & Francis Group, 2012.

MLA (8th ed.) Citation

Madou, Marc J. Fundamentals of Microfabrication and Nanotechnology. 3rd ed. CRC Press/Taylor & Francis Group, 2012.