Fundamentals of microfabrication and nanotechnology/
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, Fla.
CRC Press/Taylor & Francis Group
2012.
|
| Edition: | 3rd ed. |
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Physical Description: | xiii, 641pages illustrations (some colour) 29 cm. |
|---|---|
| ISBN: | 9781420055115 (hc : v.1) 1420055119 (hc : v.1) 9781420055191 (hc : v.2) 1420055194 (hc : v.2) 9781420055160 (hc : v.3) 142005516X (hc : v.3) |