Fundamentals of microfabrication and nanotechnology/
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, Fla.
CRC Press/Taylor & Francis Group
2012.
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| Edition: | 3rd ed. |
| Subjects: | |
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Table of Contents:
- v.1 Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
- Manufacturing techniques for microfabrication and nanotechnology
- From MEMS to bio-MEMS and bio-NEMS.