Semiconductor manufacturing technology /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Singapore
World Scientific Publishing Company
2007.
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| Series: | Advanced series in electrical and computer engineering ;
v. 13 |
| Subjects: | |
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| Physical Description: | xii, 470 pages illustrations 24 cm. |
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| ISBN: | 9812568239 9789812568236 |