Engineering thin films and nanostructures with ion beams /
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| Other Authors: | |
|---|---|
| Format: | Software eBook |
| Language: | English |
| Published: |
Boca Raton, FL
Taylor & Francis
c2005.
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| Series: | Optical engineering (Marcel Dekker, Inc.) ; v.92.
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| Subjects: | |
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| 490 | 1 | |a Optical engineering |v 92 | |
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| 504 | |a Includes bibliographical references and index. | ||
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| 650 | 0 | |a Thin films. | |
| 650 | 0 | |a Nanostructures. | |
| 650 | 0 | |a Ion bombardment |x Industrial applications. | |
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