Hsu, T. (2008). Mems and microsystems: Design, manufacture, and nanoscale engineering (Second edition.). John Wiley & Sons.
Cita Chicago (17th ed.)Hsu, Tai-Ran. Mems and Microsystems: Design, Manufacture, and Nanoscale Engineering. Second edition. Hoboken, NJ: John Wiley & Sons, 2008.
Cita MLA (8th ed.)Hsu, Tai-Ran. Mems and Microsystems: Design, Manufacture, and Nanoscale Engineering. Second edition. John Wiley & Sons, 2008.
Atenció: Aquestes cites poden no estar 100% correctes.