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Dyfyniad Arddull ChicagoHsu, Tai-Ran. Mems and Microsystems: Design, Manufacture, and Nanoscale Engineering. Second edition. Hoboken, NJ: John Wiley & Sons, 2008.
Dyfyniad MLAHsu, Tai-Ran. Mems and Microsystems: Design, Manufacture, and Nanoscale Engineering. Second edition. John Wiley & Sons, 2008.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.