Hsu, T. (2008). Mems and microsystems: Design, manufacture, and nanoscale engineering (Second edition.). John Wiley & Sons.
Chicago-Zitierstil (17. Ausg.)Hsu, Tai-Ran. Mems and Microsystems: Design, Manufacture, and Nanoscale Engineering. Second edition. Hoboken, NJ: John Wiley & Sons, 2008.
MLA-Zitierstil (8. Ausg.)Hsu, Tai-Ran. Mems and Microsystems: Design, Manufacture, and Nanoscale Engineering. Second edition. John Wiley & Sons, 2008.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.