Hsu, T. (2008). Mems and microsystems: Design, manufacture, and nanoscale engineering (Second edition.). John Wiley & Sons.
Citación estilo ChicagoHsu, Tai-Ran. Mems and Microsystems: Design, Manufacture, and Nanoscale Engineering. Second edition. Hoboken, NJ: John Wiley & Sons, 2008.
Cita MLAHsu, Tai-Ran. Mems and Microsystems: Design, Manufacture, and Nanoscale Engineering. Second edition. John Wiley & Sons, 2008.
Warning: These citations may not always be 100% accurate.