Hsu, T. (2008). Mems and microsystems: Design, manufacture, and nanoscale engineering (Second edition.). John Wiley & Sons.
Chicagoスタイル(17版)引用形式Hsu, Tai-Ran. Mems and Microsystems: Design, Manufacture, and Nanoscale Engineering. Second edition. Hoboken, NJ: John Wiley & Sons, 2008.
MLA(8版)引用形式Hsu, Tai-Ran. Mems and Microsystems: Design, Manufacture, and Nanoscale Engineering. Second edition. John Wiley & Sons, 2008.
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