Mems and microsystems : design, manufacture, and nanoscale engineering
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Hoboken, NJ
John Wiley & Sons
2008
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| Edition: | Second edition |
| Subjects: | |
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| Physical Description: | xxv, 550 pages: 24 cm. |
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| Bibliography: | Bibliography: p. 509-521. |
| ISBN: | 0470083018 (hc) 9780470083017 (hc) |