Mems and microsystems : design, manufacture, and nanoscale engineering

Mems and microsystems : design, manufacture, and nanoscale engineering

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Главный автор:	Hsu, Tai-Ran (Автор)
Формат:	‌
Язык:	English
Опубликовано:	Hoboken, NJ John Wiley & Sons 2008
Редактирование:	Second edition
Предметы:	Microelectronics. Microelectromechanical systems. Microelectronic packaging.
Метки:	Добавить метку Нет меток, Требуется 1-ая метка записи!

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