APA (7th ed.) Citation

Diebold, A. C. (2001). Handbook of silicon semiconductor metrology. Marcel Dekker.

Chicago Style (17th ed.) Citation

Diebold, A. C. Handbook of Silicon Semiconductor Metrology. New York: Marcel Dekker, 2001.

MLA (8th ed.) Citation

Diebold, A. C. Handbook of Silicon Semiconductor Metrology. Marcel Dekker, 2001.