Handbook of silicon semiconductor metrology /
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| Format: | Book |
| Language: | English |
| Published: |
New York
Marcel Dekker
2001.
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| 245 | 0 | 0 | |a Handbook of silicon semiconductor metrology / |c edited by Alain C. Diebold. |
| 264 | 1 | |a New York |b Marcel Dekker |c 2001. | |
| 300 | |a xvi, 874 pages: |b illustrations; |c 26 cm. | ||
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