CMOS-MEMS /
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| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
Weinheim, Germany
Wiley-VCH
2005.
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| Series: | Advanced micro & nanosystems ;
v. 2. |
| Subjects: | |
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| Physical Description: | xiv, 594 pages: illustrations; 25 cm. |
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| ISBN: | 3527310800 (hc) 9783527310807 (hc) |