CMOS-MEMS /
Saved in:
Other Authors: | , |
---|---|
Format: | Book |
Language: | English |
Published: |
Weinheim, Germany
Wiley-VCH
2005.
|
Series: | Advanced micro & nanosystems ;
v. 2. |
Subjects: | |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
LEADER | 01428nam a2200373 a 4500 | ||
---|---|---|---|
001 | vtls000026225 | ||
003 | MY-ArUMP | ||
005 | 20210731230401.0 | ||
008 | 120302s2005 gw a f b 001 0 eng d | ||
020 | |a 3527310800 (hc) |c RM923.40 | ||
020 | |a 9783527310807 (hc) | ||
035 | |a (OCoLC)ocm56806744 | ||
039 | 9 | |a 201203021607 |b SMT |c 201111291553 |d VLOAD |c 201111291022 |d VLOAD |c 201111161308 |d VLOAD |y 200606091002 |z NUI |e NHM | |
040 | |a MYPMP |b eng |e rda |c MYPMP | ||
090 | 0 | 0 | |a TK7875 |b C737 2005 |
245 | 0 | 0 | |a CMOS-MEMS / |c volume editors: O. Brand and G. K. Fedder. |
264 | 1 | |a Weinheim, Germany |b Wiley-VCH |c 2005. | |
300 | |a xiv, 594 pages: |b illustrations; |c 25 cm. | ||
336 | |a text |b txt |2 rdacontent | ||
337 | |a unmediated |b n |2 rdamedia | ||
338 | |a volume |b nc |2 rdacarrier | ||
490 | 1 | |a Advanced micro & nanosystems ; |v v. 2. | |
541 | |a KOPERASI KEDAIBUKU UNIVERSITI MALAYA BERHAD |d 20-08-07 | ||
591 | |a PER.2/O/07/278(a) | ||
594 | |a 25-10-07 | ||
650 | 0 | |a Microelectromechanical systems. | |
650 | 0 | |a Metal oxide semiconductors, Complementary. | |
700 | 1 | |a Brand, Oliver, |d 1964- | |
700 | 1 | |a Fedder, Gary K | |
830 | 0 | |a Advanced micro & nanosystems ; |v v. 2. | |
942 | |2 lcc |c BK-OS | ||
949 | |a VIRTUAITEM |d 30000 |f 1 |x 1 |6 027969 | ||
999 | |c 75706 |d 75706 | ||
952 | |0 0 |1 0 |2 lcc |4 0 |6 TK7875 C737 02005 |7 0 |9 63609 |a PTSFP |b PTSFP |c 1 |d 2021-07-31 |l 0 |o TK7875 C737 2005 |p 027969 |r 2021-07-31 |t 1 |w 2021-07-31 |y BK-OS |