APA (7th ed.) Citation

Campbell, S. A. (2001). The science and engineering of microelectronic fabrication (Second edition.). Oxford University Press.

Chicago Style (17th ed.) Citation

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Second edition. New York: Oxford University Press, 2001.

MLA (8th ed.) Citation

Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Second edition. Oxford University Press, 2001.