The science and engineering of microelectronic fabrication /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York
Oxford University Press
2001
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| Edition: | Second edition |
| Subjects: | |
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| Physical Description: | xiv, 603 pages: illustrations 24 cm. |
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| Bibliography: | Includes bibliographical references |
| ISBN: | 0195136055 : |