Micromechanical photonics /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Berlin, Heidelberg
Springer
2006.
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| Series: | Microtechnology and Mems
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| Subjects: | |
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| Physical Description: | xi, 250 pages: 24 cm |
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| Bibliography: | Bibliography : p. 227-242. |
| ISBN: | 3540313338 (hc) 9783540313335 (hc) |
| ISSN: | 1615-8326 |