APA (7th ed.) Citation

Rai-Choudhury, P. (1997). Handbook of microlithography, micromachining, and microfabrication. SPIE Optical Engineering Press.

Chicago Style (17th ed.) Citation

Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. Bellingham, Wash: SPIE Optical Engineering Press, 1997.

MLA (8th ed.) Citation

Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. SPIE Optical Engineering Press, 1997.

Warning: These citations may not always be 100% accurate.