Handbook of microlithography, micromachining, and microfabrication /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE Optical Engineering Press
c1997.
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| Subjects: | |
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| Physical Description: | v. illustrations; 26 cm. |
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| Bibliography: | Includes bibliographical references. |
| ISBN: | 0819423793 (v. 2) (pbk) (SPIE Press) 0852969112 (v.2) (IEE ) |