Beam injection assessment of microstructures in semiconductors : BIAMS 2000 : proceedings of the 6th International Workshop on Beam Injection Assessment of Mictrostructures in Semiconductors held in Fukuoka, Japan, November 12-16, 2000 /
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| Corporate Author: | |
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| Other Authors: | , |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Uetikon-Zuerich, Switzerland
Scitec Publications,
c2001.
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| Series: | Diffusion and defect data--solid state data. Pt. B, Solid state phenomena,
v. 78-79 |
| Subjects: | |
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