Rossnagel, S. M., Westwood, W. D., & Cuomo, J. J. (1990). Handbook of plasma processing technology: Fundamentals, etching, deposition, and surface interactions. Noyes Publications.
Chicago Style (17th ed.) CitationRossnagel, Stephen M., William D. Westwood, and J. J. Cuomo. Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface Interactions. Park Ridge: Noyes Publications, 1990.
MLA (8th ed.) CitationRossnagel, Stephen M., et al. Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface Interactions. Noyes Publications, 1990.
Warning: These citations may not always be 100% accurate.