Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
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| Other Authors: | , , |
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| Format: | Book |
| Language: | English |
| Published: |
Park Ridge
Noyes Publications
c1990.
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| Series: | Materials science and process technology series
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| Subjects: | |
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| Physical Description: | xxiii, 523 pages illustrations 25 cm |
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| Bibliography: | Includes bibliographical references. |
| ISBN: | 0815512201 |